JPH0344242B2 - - Google Patents

Info

Publication number
JPH0344242B2
JPH0344242B2 JP58090194A JP9019483A JPH0344242B2 JP H0344242 B2 JPH0344242 B2 JP H0344242B2 JP 58090194 A JP58090194 A JP 58090194A JP 9019483 A JP9019483 A JP 9019483A JP H0344242 B2 JPH0344242 B2 JP H0344242B2
Authority
JP
Japan
Prior art keywords
objective lens
light source
image
lens
alignment mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58090194A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58213207A (ja
Inventor
Akyoshi Suzuki
Masao Totsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58090194A priority Critical patent/JPS58213207A/ja
Publication of JPS58213207A publication Critical patent/JPS58213207A/ja
Publication of JPH0344242B2 publication Critical patent/JPH0344242B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58090194A 1983-05-23 1983-05-23 アライメントマーク検出方法 Granted JPS58213207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58090194A JPS58213207A (ja) 1983-05-23 1983-05-23 アライメントマーク検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58090194A JPS58213207A (ja) 1983-05-23 1983-05-23 アライメントマーク検出方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP50042083A Division JPS593791B2 (ja) 1975-04-07 1975-04-07 物体の像認識方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP62035334A Division JPS62201302A (ja) 1987-02-18 1987-02-18 アライメントマ−ク検出方法

Publications (2)

Publication Number Publication Date
JPS58213207A JPS58213207A (ja) 1983-12-12
JPH0344242B2 true JPH0344242B2 (en]) 1991-07-05

Family

ID=13991669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58090194A Granted JPS58213207A (ja) 1983-05-23 1983-05-23 アライメントマーク検出方法

Country Status (1)

Country Link
JP (1) JPS58213207A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60179806U (ja) * 1984-05-08 1985-11-29 ヤ−マン株式会社 非接触光学式変位測定装置用ビユワ−
JPS60235002A (ja) * 1984-05-08 1985-11-21 Ya Man Ltd 非接触光学式変位測定装置用ビユワ−
JP3385442B2 (ja) * 1994-05-31 2003-03-10 株式会社ニュークリエイション 検査用光学系および検査装置
JP3404134B2 (ja) * 1994-06-21 2003-05-06 株式会社ニュークリエイション 検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593791B2 (ja) * 1975-04-07 1984-01-26 キヤノン株式会社 物体の像認識方法

Also Published As

Publication number Publication date
JPS58213207A (ja) 1983-12-12

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